Patent Assignment
Reel/Frame 040292/0264
Assignment of Assignor's Interest
Recorded: 2016-11-11
Pages: 3
Assignor
LAVOIE, ADRIEN
Executed: 2016-11-10
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Self-Aligned Multi-Patterning Process Flow with Ald Gapfill Spacer Mask