Patent Assignment
Reel/Frame 040293/0060
Assignment of Assignor's Interest
Recorded: 2016-11-11
Pages: 7
Assignors
YAKUNIN, ANDREY MIKHAILOVICH
Executed: 2008-09-17
BANINE, VADIM YEVGENYEVICH
Executed: 2009-03-03
MOORS, JOHANNES HUBERTUS JOSEPHINA
Executed: 2009-04-03
SJMAENOK, LEONID AIZIKOVITCH
Executed: 2009-02-12
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Radiation Source, Lithographic Apparatus, and Device Manufacturing Method