Patent Assignment
Reel/Frame 040302/0310
Assignment of Assignor's Interest
Recorded: 2016-11-14
Pages: 3
Assignors
MINK, MARTIJN PETER
Executed: 2014-07-11
BROK, JANNE MARIA
Executed: 2014-07-11
SETIJA, IRWAN DANI
Executed: 2014-07-15
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL - 5504 DR, NETHERLANDS
Covered Property
(1)
Method and Apparatus for Measuring a Structure on a Substrate, Models for Error Correction, Computer Program Products for Implementing Such Methods and Apparatus