Patent Assignment
Reel/Frame 040306/0929
Assignment of Assignor's Interest
Recorded: 2016-11-14
Pages: 3
Assignee
MITSUI CHEMICALS, INC.
5-2, HIGASHI-SHIMBASHI 1-CHOME, MINATO-KU, TOKYO, 105-7122, JAPAN
Covered Property
(1)
Pellicle Membrane, Pellicle, Original Plate for Exposure, Exposure Apparatus, and Method of Producing Semiconductor Device