Patent Assignment
Reel/Frame 040308/0670
Assignment of Assignor's Interest
Recorded: 2016-11-14
Pages: 14
Assignors
KAKIMOTO, AKINOBU
Executed: 2016-10-31
HAYAKAWA, YOSHINOBU
Executed: 2016-10-19
MIZUNAGA, SATOSHI
Executed: 2016-10-28
HAMADA, YASUHIRO
Executed: 2016-10-31
OKADA, MITSUHIRO
Executed: 2016-10-19
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing System and Substrate Processing Method