Patent Assignment
Reel/Frame 040312/0566
Assignment of Assignor's Interest
Recorded: 2016-11-14
Pages: 3
Assignors
TAI, WEN-CHUAN
Executed: 2016-11-03
CHEN, HSIANG-FU
Executed: 2016-11-07
HU, FAN
Executed: 2016-11-03
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO.8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Mems Structure with Bilayer Stopper and Method for Forming the Same