Patent Assignment
Reel/Frame 040313/0423
Assignment of Assignor's Interest
Recorded: 2016-11-14
Pages: 13
Assignors
BEZEL, ILYA
Executed: 2016-08-15
GROSS, KENNETH P.
Executed: 2016-08-01
WILSON, LAUREN
Executed: 2016-08-01
YADAV, RAHUL
Executed: 2016-08-01
WITTENBERG, JOSHUA
Executed: 2016-09-09
BHUIYAN, AIZAZ
Executed: 2016-08-01
SHCHEMELININ, ANATOLY
Executed: 2016-08-01
CHIMMALGI, ANANT
Executed: 2016-08-03
SOLARZ, RICHARD
Executed: 2016-09-08
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
System and Method for Inhibiting VUV Radiative Emission of a Laser-Sustained Plasma Source