Patent Assignment
Reel/Frame 040328/0433
Assignment of Assignor's Interest
Recorded: 2016-11-15
Pages: 5
Assignors
TAPILY, KANDABARA N.
Executed: 2016-11-07
TRICKETT, YING
Executed: 2016-11-07
TAMURA, CHIHIRO
Executed: 2016-11-07
WAJDA, CORY
Executed: 2016-11-07
LEUSINK, GERRIT J.
Executed: 2016-11-11
MAEKAWA, KAORU
Executed: 2016-11-10
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method of Corner Rounding and Trimming of Nanowires by Microwave Plasma