Patent Assignment
Reel/Frame 040370/0553
Assignment of Assignor's Interest
Recorded: 2016-11-18
Pages: 3
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL - 5504 DR, NETHERLANDS
Covered Property
(1)
Inspection Methods, Substrates Having Metrology Targets, Lithographic System and Device Manufacturing Method