Patent Assignment
Reel/Frame 040416/0855
Assignment of Assignor's Interest
Recorded: 2016-11-25
Pages: 6
Assignors
SHCHEGROV, ANDREI V.
Executed: 2016-10-18
KRISHNAN, SHANKAR
Executed: 2016-10-17
PANDEV, STILIAN IVANOV
Executed: 2016-09-16
PETERLINZ, KEVIN
Executed: 2016-11-03
DZIURA, THADDEUS GERARD
Executed: 2016-10-12
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Measurement Of Multiple Patterning Parameters