Patent Assignment
Reel/Frame 040436/0988
Assignment of Assignor's Interest
Recorded: 2016-10-20
Pages: 4
Assignors
SHINOZAKI, HIROYUKI
Executed: 2016-08-23
FUKUSHIMA, MAKOTO
Executed: 2016-08-23
NABEYA, OSAMU
Executed: 2016-08-23
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, 144-8510, JAPAN
Covered Property
(1)
Substrate Adsorption Method, Substrate Holding Apparatus, Substrate Polishing Apparatus, Elastic Film, Substrate Adsorption Determination Method for Substrate Holding Apparatus, and Pressure Control Method for Substrate Holding Apparatus