Patent Assignment
Reel/Frame 040494/0881
Assignment of Assignor's Interest
Recorded: 2016-12-02
Pages: 2
Assignors
CHIU, YI-WEI
Executed: 2016-11-14
WU, MENG-CHUAN
Executed: 2016-11-14
WENG, TZU-CHAN
Executed: 2016-11-14
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
System and Method for Selective Nitride Etch