Patent Assignment
Reel/Frame 040511/0110
Assignment of Assignor's Interest
Recorded: 2016-12-04
Pages: 3
Assignor
YAMADA, MASANORI
Executed: 2016-08-08
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Lithography Apparatus, Pattern Forming Method, and Method for Manufacturing Product