Patent Assignment
Reel/Frame 040512/0338
Assignment of Assignor's Interest
Recorded: 2016-10-28
Pages: 5
Assignors
ZHU, YU
Executed: 2016-10-27
ZHANG, MING
Executed: 2016-10-27
ZHI, FAN
Executed: 2016-10-27
LIU, ZHAO
Executed: 2016-10-27
CHENG, RONG
Executed: 2016-10-27
YANG, KAIMING
Executed: 2016-10-27
ZHANG, LI
Executed: 2016-10-27
QIN, HUICHAO
Executed: 2016-10-27
ZHAO, YANPO
Executed: 2016-10-27
TIAN, LI
Executed: 2016-10-27
YE, WEINAN
Executed: 2016-10-27
ZHANG, JIN
Executed: 2016-10-27
YIN, WENSHENG
Executed: 2016-10-27
MU, HAIHUA
Executed: 2016-10-27
HU, JINCHUN
Executed: 2016-10-27
Assignees
TSINGHUA UNIVERSITY
POST BOX100084 BRANCH 82, TSINGHUA UNIVERSITY, PATENT OFFICE, HAIDIAN DISTRICT, BEIJING, 100084, CHINA
BEIJING U-PRECISION TECH CO., LTD.
ROOM B1009, XUEYAN PLAZA, TUSPARK, HAIDIAN DISTRICT, BEIJING, 100084, CHINA
Covered Property
(1)
Coarse Motion and Fine Motion Integrated Reticle Stage Driven by Planar Motor