Patent Assignment
Reel/Frame 040600/0294
Assignment of Assignor's Interest
Recorded: 2016-12-08
Pages: 4
Assignors
PRICE, MICHAEL LESLIE
Executed: 2016-11-02
STINSON, CORY ALAN
Executed: 2016-09-30
MITRY, MARK JOSEPH
Executed: 2016-11-02
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Target Trajectory Metrology in an Extreme Ultraviolet Light Source