Patent Assignment
Reel/Frame 040638/0541
Assignment of Assignor's Interest
Recorded: 2016-12-15
Pages: 2
Assignors
NI, TUQIANG
Executed: 2016-12-05
ZUO, RASON
Executed: 2016-12-05
WU, DEE
Executed: 2016-12-05
RIN, SHA
Executed: 2016-12-05
Assignee
ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
188 TAIHUA ROAD, JINQIAO EXPORT PROCESSING ZONE (SOUTH AREA), PUDONG, SHANGHAI, 201201, CHINA
Covered Property
(1)
Multi-Zone Active-Matrix Temperature Control System and Temperature Control Method, and Electrostatic Chuck and Plasma Processing Apparatus Apply Thereof
Application:
15/380,979 →
Publication:
US 2017/0186592
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.