Patent Assignment
Reel/Frame 040664/0879
Assignment of Assignor's Interest
Recorded: 2016-12-19
Pages: 5
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Semiconductor Device and Manufacturing Method Thereof by Forming Thin Uniform Silicide on Epitaxial Source/Drain Structure