Patent Assignment
Reel/Frame 040666/0041
Assignment of Assignor's Interest
Recorded: 2016-12-19
Pages: 4
Assignors
CHO, JAEYONG
Executed: 2016-12-16
PARKHE, VIJAY D.
Executed: 2016-12-16
WANG, HAITAO
Executed: 2016-12-16
RAMASWAMY, KARTIK
Executed: 2016-12-16
ZHANG, CHUNLEI
Executed: 2016-12-16
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
High Power Electrostatic Chuck Design with Radio Frequency Coupling