Patent Assignment
Reel/Frame 040707/0473
Assignment of Assignor's Interest
Recorded: 2016-12-12
Pages: 3
Assignors
TAKEDA, RYOHEI
Executed: 2016-12-01
TOMINAGA, SHO
Executed: 2016-12-01
OOYA, YOSHINOBU
Executed: 2016-12-06
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Etching Method