Patent Assignment
Reel/Frame 040717/0171
Assignment of Assignor's Interest
Recorded: 2016-12-12
Pages: 4
Assignors
HITACHI, LTD
Executed: 2016-10-04
CANON KABUSHIKI KAISHA
Executed: 2016-11-30
ADVANTEST CORPORATION
Executed: 2016-10-17
Assignees
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
ADVANTEST CORPORATION
1-32-1, ASAI-CHO, NERIMA-KU, TOKYO, JAPAN
Covered Property
(1)
Charged Particle Beam Exposure Apparatus, Device Manufacturing Method, and Charged Particle Beam Applied Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.