Patent Assignment
Reel/Frame 040724/0358
Assignment of Assignor's Interest
Recorded: 2016-12-13
Pages: 4
Assignor
MATTSON THERMAL PRODUCTS GMBH
Executed: 2016-10-04
Assignee
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Fluid Leakage Detection for a Millisecond Anneal System
Related Assignments
(4)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Dec 13, 2016
From: MUELLER, MANUEL; HEZLER, DIETER
To: MATTSON THERMAL PRODUCTS GMBH
Reel/Frame 040724/0296 →
Security Interest
Aug 27, 2018
From: MATTSON TECHNOLOGY, INC.
To: EAST WEST BANK
Reel/Frame 046956/0348 →
Assignment of Assignor's Interest
Sep 30, 2019
From: MATTSON TECHNOLOGY, INC.
To: MATTSON TECHNOLOGY, INC.; BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
Reel/Frame 050582/0796 →
Release of Security Interest
Apr 15, 2021
From: EAST WEST BANK
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 055950/0452 →