Patent Assignment
Reel/Frame 040726/0094
Assignment of Assignor's Interest
Recorded: 2016-12-13
Pages: 8
Assignors
CHOI, YOUNG-JIN
Executed: 2016-10-05
CHO, SU HO
Executed: 2016-11-11
PARK, BEOMSOO
Executed: 2016-12-09
PENG, FEI
Executed: 2016-10-10
CHOI, SOO YOUNG
Executed: 2016-11-09
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Methods and Apparatus for Processing Chamber Cleaning End Point Detection