Patent Assignment
Reel/Frame 040731/0235
Assignment of Assignor's Interest
Recorded: 2016-12-14
Pages: 3
Assignors
TAKASHIMA, RYUICHI
Executed: 2016-12-01
GOHIRA, TAKU
Executed: 2016-12-01
OOYA, YOSHINOBU
Executed: 2016-12-06
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Etching Method