Patent Assignment
Reel/Frame 040740/0571
Assignment of Assignor's Interest
Recorded: 2016-12-15
Pages: 4
Assignor
YOKOTA, AKIHIRO
Executed: 2016-12-13
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.