Patent Assignment
Reel/Frame 041329/0724
Corrective Assignment to Add the Second and Third Omitted Inventors Data Previously Recorded on Reel 040740 Frame 0571. Assignor(S) Hereby Confirms the Assignment.
Recorded: 2017-01-11
Pages: 7
Assignors
YOKOTA, AKIHIRO
Executed: 2016-12-13
ITO, ETSUJI
Executed: 2016-12-13
HIMORI, SHINJI
Executed: 2016-12-13
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.