Patent Assignment
Reel/Frame 040772/0706
Assignment of Assignor's Interest
Recorded: 2016-12-27
Pages: 5
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Resist Composition and Patterning Process