Patent Assignment
Reel/Frame 040781/0499
Assignment of Assignor's Interest
Recorded: 2016-12-28
Pages: 4
Assignor
KIM, TEA-GEON
Executed: 2016-10-11
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Substrate Cleaning Apparatus and Substrate Processing Facility Having the Same