Patent Assignment
Reel/Frame 040805/0770
Assignment of Assignor's Interest
Recorded: 2016-12-29
Pages: 10
Assignors
HUI, KEUNG
Executed: 2016-09-02
SUNG, JIN-NING
Executed: 2016-09-10
MOU, JONG-I
Executed: 2016-09-02
HUANG, SOON-KANG
Executed: 2016-09-02
TSEN, YEN-DI
Executed: 2016-09-02
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Apparatus and Method for Chemical Mechanical Polishing Process Control