Patent Assignment
Reel/Frame 040830/0805
Assignment of Assignor's Interest
Recorded: 2016-12-04
Pages: 3
Assignor
SUMIYOSHI, YUHEI
Executed: 2016-08-02
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Distortion Detection Method, Exposure Apparatus, Exposure Method, and Device Manufacturing Method