Patent Assignment
Reel/Frame 040845/0178
Assignment of Assignor's Interest
Recorded: 2017-01-04
Pages: 10
Assignors
BAMNOLKER, HANNA
Executed: 2016-12-16
COLLINS, JOSHUA
Executed: 2016-12-16
SADILEK, TOMAS
Executed: 2016-12-16
SHIN, HYEONG SEOP
Executed: 2016-12-19
SCHLOSS, LAWRENCE
Executed: 2016-12-16
BA, XIAOLAN
Executed: 2017-01-03
HUMAYUN, RAASHINA
Executed: 2017-01-04
DANEK, MICHAL
Executed: 2017-01-03
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Method of Forming Low Resistivity Fluorine Free Tungsten Film Without Nucleation