Patent Assignment
Reel/Frame 040859/0082
Assignment of Assignor's Interest
Recorded: 2017-01-05
Pages: 4
Assignees
IMEC VZW
KAPELDREEF 75, LEUVEN, 3001, BELGIUM
KATHOLIEKE UNIVERSITEIT LEUVEN, KU LEUVEN R&D
WAAISTRAAT 6, BOX 5105, LEUVEN, 3000, BELGIUM
Covered Property
(1)
Method of Forming a Feature of a Target Material on a Substrate