Patent Assignment
Reel/Frame 040868/0152
Assignment of Assignor's Interest
Recorded: 2016-12-09
Pages: 3
Assignors
DATTILO, DAVIDE
Executed: 2016-12-02
DIETZE, UWE
Executed: 2016-12-02
SAMAYOA, MARTIN
Executed: 2016-12-02
Assignee
SUSS MICROTEC PHOTOMASK EQUIPMENT GMBH & CO. KG
FERDINAND-VON-STEINBEIS RING 10, STERNENFELS, 75447, GERMANY
Covered Property
(1)
Apparatus and Method for Cleaning a Partial Area of a Substrate