Patent Assignment
Reel/Frame 040875/0501
Assignment of Assignor's Interest
Recorded: 2017-01-06
Pages: 4
Assignors
RODRIGO, CHIRANTHA
Executed: 2016-01-14
ZHANG, JINGCHUN
Executed: 2016-01-14
JI, LILI
Executed: 2016-01-18
WANG, ANCHUAN
Executed: 2016-02-10
INGLE, NITIN K.
Executed: 2016-02-10
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Hydrogen Plasma Based Cleaning Process for Etch Hardware