Patent Assignment
Reel/Frame 040878/0630
Assignment of Assignor's Interest
Recorded: 2017-01-06
Pages: 4
Assignors
GUO, GUANGSHENG
Executed: 2017-01-04
WANG, SIYU
Executed: 2017-01-04
PU, QIAOSHENG
Executed: 2017-01-04
WANG, XIAYAN
Executed: 2017-01-04
Assignee
BEIJING UNIVERSITY OF TECHNOLOGY
NO.100 PINGLEYUAN, CHAOYANG DISTRICT, BEIJING, CHINA
Covered Property
(1)
Plasma assisted method of accurate alignment and pre-bonding for microstructure including glass or quartz chip