Patent Assignment
Reel/Frame 040901/0050
Assignment of Assignor's Interest
Recorded: 2017-01-09
Pages: 8
Assignors
ZEITNER, UWE DETLEF
Executed: 2016-10-27
WEICHELT, TINA
Executed: 2016-11-07
BOURGIN, YANNICK
Executed: 2016-11-05
Assignees
FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
HANSASTR. 27C, MUNICH, 80686, GERMANY
FRIEDRICH-SCHILLER-UNIVERSITÄT JENA
FÜGERSTENGRABEN 1, JENA, 07743, GERMANY
Covered Property
(1)
Illumination Unit and Device for Lithographic Exposure