Patent Assignment
Reel/Frame 040939/0360
Assignment of Assignor's Interest
Recorded: 2017-01-10
Pages: 2
Assignors
FENG, YE
Executed: 2017-01-03
KUMAR, PRASHANTH
Executed: 2017-01-10
BAILEY, ANDREW D., III
Executed: 2017-01-03
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Method of Feature Exaction from Time-series of Spectra to Control Endpoint of Process