Patent Assignment
Reel/Frame 040953/0013
Assignment of Assignor's Interest
Recorded: 2017-01-12
Pages: 2
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Method and System for Monitoring Polishing Pad Before Cmp Process