Patent Assignment
Reel/Frame 040961/0521
Assignment of Assignor's Interest
Recorded: 2016-12-15
Pages: 6
Assignors
BATZER, RACHEL
Executed: 2016-11-29
QIU, HUATAN
Executed: 2016-11-22
VARADARAJAN, BHADRI
Executed: 2016-11-22
BREILING, PATRICK GIRARD
Executed: 2016-12-07
GONG, BO
Executed: 2016-11-22
SCHLOSSER, WILL
Executed: 2016-11-28
GUI, ZHE
Executed: 2016-11-23
TAN, TAIDE
Executed: 2016-12-09
HOHN, GEOFFREY
Executed: 2016-12-02
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Integrated Showerhead with Thermal Control for Delivering Radical and Precursor Gas to a Downstream Chamber to Enable Remote Plasma Film Deposition