Patent Assignment
Reel/Frame 040976/0358
Assignment of Assignor's Interest
Recorded: 2017-01-16
Pages: 8
Assignors
BEZEL, ILYA
Executed: 2016-05-25
SHCHEMELININ, ANATOLY
Executed: 2016-05-25
SHIFRIN, EUGENE
Executed: 2016-05-25
PANZER, MATTHEW
Executed: 2016-09-09
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Continuous-Wave Laser-Sustained Plasma Illumination Source