Patent Assignment
Reel/Frame 040977/0272
Assignment of Assignor's Interest
Recorded: 2017-01-16
Pages: 7
Assignors
KURITSYN, ALEXEY
Executed: 2016-09-19
LIU, YE
Executed: 2016-09-20
KHODYKIN, OLEG
Executed: 2016-12-20
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Plasma Based Light Source Having a Target Material Coated on a Cylindrically-Symmetric Element