Patent Assignment
Reel/Frame 040980/0461
Assignment of Assignor's Interest
Recorded: 2016-12-15
Pages: 2
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Technique to Deposit Sidewall Passivation for High Aspect Ratio Cylinder Etch