Patent Assignment
Reel/Frame 040989/0709
Assignment of Assignor's Interest
Recorded: 2016-12-15
Pages: 4
Assignor
SUZUKI, TAKAYUKI
Executed: 2016-12-12
Assignee
A-SAT CORPORATION
FUJISTAR KODENMACHO BLDG., 2F-B, 4-3,, NIHONBASHI-KODENMACHO,, CHUO-KU, TOKYO 1030001, JAPAN
Covered Property
(1)
Method of Measuring Gas Introducing Hole Provided in Electrode for Plasma Etching Device, Electrode, Electrode Regeneration Method, Regenerated Electrode, Plasma Etching Device, and Gas Introducing Hole State Distribution Diagram and Display Method for Same