Patent Assignment
Reel/Frame 040995/0216
Assignment of Assignor's Interest
Recorded: 2017-01-17
Pages: 4
Assignors
TEL, WIM TJIBBO
Executed: 2014-08-12
HINNEN, PAUL CHRISTIAAN
Executed: 2014-08-12
JUNGBLUT, REINER MARIA
Executed: 2014-08-18
STAALS, FRANK
Executed: 2014-08-12
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, NL-5500 AH, NETHERLANDS
Covered Property
(1)
Method for Determining a Process Window for a Lithographic Process, Associated Apparatuses and a Computer Program