Patent Assignment
Reel/Frame 041017/0324
Assignment of Assignor's Interest
Recorded: 2017-01-19
Pages: 6
Assignors
SAWACHI, ATSUSHI
Executed: 2017-01-10
SASAKI, NORIKAZU
Executed: 2017-01-10
YAMASHIMA, JUN
Executed: 2017-01-10
SATO, YOSHIYASU
Executed: 2017-01-10
NOGAMI, KENICHI
Executed: 2017-01-11
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Gas Supply System, Plasma Processing Apparatus, and Operation Method for Plasma Processing Apparatus