Patent Assignment
Reel/Frame 041020/0006
Assignment of Assignor's Interest
Recorded: 2017-01-19
Pages: 11
Assignors
SHCHEGROV, ANDREI V.
Executed: 2016-08-09
ROTTER, LAWRENCE D.
Executed: 2016-10-16
WANG, DAVID Y.
Executed: 2016-08-08
VELDMAN, ANDREI
Executed: 2016-08-08
PETERLINZ, KEVIN
Executed: 2016-08-08
BRADY, GREGORY
Executed: 2016-10-20
SHAUGHNESSY, DERRICK A.
Executed: 2016-08-08
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Optical Metrology Tool Equipped with Modulated Illumination Sources