Patent Assignment
Reel/Frame 041060/0862
Assignment of Assignor's Interest
Recorded: 2017-01-24
Pages: 4
Assignor
VEERASINGAM, RAMANAPATHY
Executed: 2017-01-23
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Virtual Metrology Systems and Methods for Using Feedforward Critical Dimension Data to Predict Other Critical Dimensions of a Wafer