Patent Assignment
Reel/Frame 041079/0890
Assignment of Assignor's Interest
Recorded: 2016-12-21
Pages: 3
Assignors
WARDENIER, PETER HANZEN
Executed: 2015-06-22
STAALS, FRANK
Executed: 2015-06-23
VAESSEN, JEAN-PIERRE AGNES HENRICUS MARIE
Executed: 2015-06-19
VAN DER LAAN, HANS
Executed: 2015-06-19
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Method of Metrology, Inspection Apparatus, Lithographic System and Device Manufacturing Method