Patent Assignment
Reel/Frame 041091/0613
Assignment of Assignor's Interest
Recorded: 2017-01-26
Pages: 5
Assignors
HAMAMOTO, KAZUHIRO
Executed: 2016-01-06
ASAKAWA, TATSUO
Executed: 2016-01-06
SHOKI, TSUTOMU
Executed: 2016-01-06
Assignee
HOYA CORPORATION
7-5, NAKA-OCHIAI 2-CHOME, SHINJUKU-KU, TOKYO, JAPAN
Covered Property
(1)
Reflective Mask Blank, Method of Manufacturing Reflective Mask Blank, Reflective Mask and Method of Manufacturing Semiconductor Device