Patent Assignment
Reel/Frame 041097/0381
Assignment of Assignor's Interest
Recorded: 2017-01-26
Pages: 3
Assignor
MATSUMOTO, KENJI
Executed: 2017-01-11
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Cu WIRING MANUFACTURING METHOD AND Cu WIRING MANUFACTURING SYSTEM