Patent Assignment
Reel/Frame 041112/0770
Assignment of Assignor's Interest
Recorded: 2017-01-27
Pages: 9
Assignors
KURITSYN, ALEXEY
Executed: 2016-09-17
AHR, BRIAN
Executed: 2016-09-19
GARCIA, RUBY F.
Executed: 2016-11-08
CHILESE, FRANK
Executed: 2016-11-08
KHODYKIN, OLEG
Executed: 2016-09-19
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Laser Produced Plasma Light Source Having a Target Material Coated on a Cylindrically-Symmetric Element